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聯繫我們
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320x400mm Slit-spin Coater
提供大尺寸基板高材料利用率的塗佈製程
Providing high material utilization coating process for large-sized substrate.
一般Spin Coating塗料利用率2-5%; Slit-spin Coating塗料利用率可提升至>70%,適用於大尺寸基板塗佈與高價值塗料塗佈應用。 Slit-spin coater enables high material utilization of above 70% compared to spin coating of around 2-5%, suitable for coating of large-sized substrate and high cost materials.
產品詳細說明
規格(Specifications)
**300mmx300mmx0.7mm玻璃塗佈厚膜光阻17.5μm,膜厚均勻性<±1%**●基板尺寸 Substrate Size:320x400mm
●供料方式 Dispense Type:狹縫塗佈頭 Slot Die ●塗佈頭驅動 Die Moving:線性馬達驅動 Linear Motor Driving ●塗料供應 Material Supply:注射幫浦 Syringe Pump ●排氣方式 Air Release Type:塗佈頭排氣模組 Die Air Release Module ●塗料黏度 Material Viscosity:1~100cps ●塗佈厚度 Coating Thickness:1~100μm (Dry) ●塗料應用 Material Applications:高價值塗料例如Polyimide, OLED Passivation/Bank Materials, and etc. 欣賢科技-狹縫旋轉式與狹縫式塗佈機系列規格詳細說明(可下載) Slit-spin Coater技術比較請參考型錄下載區檔案說明。