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聯繫我們
- 02-8695-1711
500x500mm Slit-spin Coater
提供Metal Mesh與光學轉印精微模具的厚膜光阻塗佈製程 Providing thick-film photo resist coating process in metal mesh and optical precision molding applications.
一般Spin Coating塗料利用率2-5%; Slit-spin Coating塗料利用率可提升至>70%,適用於大尺寸基板塗佈與高價值塗料塗佈應用。 Slit-spin coater enables high material utilization of above 70% compared to spin coating of around 2-5%, suitable for coating of large-sized substrate and high cost materials.
產品詳細說明
規格(Specifications)
●基板尺寸 Substrate Size:500x500mm ●供料方式 Dispense Type:狹縫塗佈頭 Slot Die ●塗佈頭驅動 Die Moving:線性馬達驅動 Linear Motor Driving ●塗料供應 Material Supply:注射幫浦 Syringe Pump ●排氣方式 Air Release Type:塗佈頭排氣模組 Die Air Release Module ●塗料黏度 Material Viscosity:1~1000cps ●塗佈厚度 Coating Thickness:1~100μm (Dry) ●塗料應用 Material Applications:Photo Resist, Polyimide, OLED Passivation/Bank Materials, and etc. 欣賢科技-狹縫旋轉式與狹縫式塗佈機系列規格詳細說明(可下載)Slit-spin Coater技術比較請參考型錄下載區檔案說明。